isotropic etching

用法例句

XeF2 can react directly with silicon spontaneously without ionization required, so it can be used as the gas for isotropic dry etching of silicon.

XeF2不需要任何电离作用,与硅可发生自发反应,可用作对硅各向同性干法刻蚀。

The fabrication of the pump cavity and one-way valve by anisotropic etching a.

针对微泵的关键结构——复合驱动膜,探索了一种Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时探讨并解决了硅各向异性刻蚀微泵的微驱动腔、单向阀的工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征。

The problems of fabrication for the pump cavity and one-way valve fabricated by anisotropic etching are investigated and.

针对微驱动器的关键结构驱动膜,探索了Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时详细探讨了硅各向异性刻蚀微驱动器的关键部件驱动腔、单向阀的工艺,解决了集成制作的V型阀微驱动器的关键工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征。

Through studying the process of ICP and anisotropic etching associate with bonding technology, ideal silicon tips and suitable process conditions were obtained.

隧道硅尖的制备是微机械隧道传感器制作的一个重要组成部分 ,通过对ICP刻蚀和湿法各向异性刻蚀工艺制备硅尖实验的研究 ,得到了合适的工艺条件以及较理想的硅

It has advantages of sample structure, low damage and anisotropic etching.

该装置具有结构简单，低损伤和各向异性刻蚀的优点。

Study on the Wet Anisotropic Etching Characteristics of (100)、(110) Silicon;

（100）、（110）硅片湿法各向异性腐蚀特性研究

Therefore, plasma etching anisotropy can be improved by increasing rf frequency or rf-bias power.

因此,等离子体刻蚀的各向异性可以通过增加射频频率和射频功率来改善。

Simulation of Anisotropic Etching for Micro Structure of Crystal Silicon Based on CA Model;

基于CA模型的单晶硅各向异性腐蚀微观模拟

The Computer Micro-Simulation of Silicon Crystal Anisotropic Etching;

单晶硅各向异性腐蚀的计算机微观模拟

Simulation of Silicon Anisotropic Etching Using Cellular Automata Method;

用元胞自动机方法模拟硅的各向异性腐蚀

Research on Anisotropic Etching Processing Technique with Wet Method on Silicon Devices

硅器件湿法各向异性腐蚀加工技术研究

isotropy and anisotropy

各向同性和各向异性

tical anisotropy

光学的各向异性;光学各向同性;光学异向性

elasticity of anisotropics

各向异性体弹性力学

electrooptical anisotropy

电学、光学各向异性现象

material with anisotropic thermal expansion

各向异性热膨胀材料

intrinsic anisotropy

(纤维的) 内在各向异性

heterogeneous anisotropic media

非均质各向异性介质

orthotropic deck structure

正交各向异性桥面结构

anisotropic dielectric waveguide

各向异性电介质波导

anisotropy dipmeter

各向异性地层倾角仪

infrared absorption anisotropy

红外[线]吸收[的]各向异性